A Reynolds equation modelling Coriolis force effects on chemical mechanical polishing
Sign Up to like & getrecommendations! Published in 2017 at "International Journal of Non-linear Mechanics"
DOI: 10.1016/j.ijnonlinmec.2017.04.003
Abstract: Abstract A Reynolds equation modelling chemical mechanical polishing in cylindrical polar coordinates is derived. Coriolis force effects are included in the derivation of the model equation. The main effect of the Coriolis force is to… read more here.
Keywords: reynolds equation; equation modelling; force; mechanical polishing ... See more keywords