Optimization of Platinum dioxide properties by plasma oxidation of sputtered PtOx
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DOI: 10.1016/j.mtla.2019.100477
Abstract: Abstract We have previously used reactively sputtered Platinum oxide thin film as DNA sensing element. In this work, we subject the reactively sputtered Platinum oxide thin films to an additional RIE step for 3, 6… read more here.
Keywords: rie step; platinum; film; platinum oxide ... See more keywords