LAUSR

Robot Waiting Time Analysis and Its Impact on Wafer Delay Time of Single-Arm Cluster Tools

Sign Up to like & get
recommendations!
1 Published in 2020 at "IFAC-PapersOnLine"

DOI: 10.1016/j.ifacol.2021.04.056

Abstract: Abstract With the circuit width of a wafer being decreased below 10 nanometers, it is important to reduce the wafer delay time in a process module as much as possible since too long wafer delay… read more here.

Keywords: time; waiting time; robot waiting; delay time ... See more keywords