Large‐Scale Hf0.5Zr0.5O2 Membranes with Robust Ferroelectricity
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DOI: 10.1002/adma.202109889
Abstract: Hafnia‐based compounds have considerable potential for use in nanoelectronics due to their compatibility with complementary metal–oxide–semiconductor devices and robust ferroelectricity at nanoscale sizes. However, the unexpected ferroelectricity in this class of compounds often remains elusive… read more here.
Keywords: 5zr0 5o2; large scale; scale hf0; robust ferroelectricity ... See more keywords