Robust five-degree-of-freedom measurement system with self-compensation and air turbulence protection.
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DOI: 10.1364/oe.480772
Abstract: A robust five-degree-of-freedom (5-DOF) measurement system is proposed in this paper. The compact optical configuration with high resolution is designed based on lens combination and multiple reflections. Beam drift and dual-beam parallelism are monitored and… read more here.
Keywords: system; protection; robust five; air turbulence ... See more keywords