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Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618000867
Abstract: 1. National Center for Electron Microscopy in Beijing, School of Materials Science and Engineering, Tsinghua Univ., Beijing, P. R. China. 2. Dept. of Condens. Matter Phys. and Mater. Sci., Brookhaven National Lab., Upton, NY. 3.…
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Keywords:
beijing china;
oxygen vacancy;
roles oxygen;
microscopy ... See more keywords
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Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c07258
Abstract: Roles of oxygen interstitial defects located in the In-Ga-Zn-O (IGZO) thin films prepared by atomic layer deposition were investigated with controlling the cationic compositions and gate-stack process conditions. It was found from the spectroscopic ellipsometry…
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Keywords:
gate stack;
oxygen interstitial;
thin films;
interstitial defects ... See more keywords