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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13030461
Abstract: Roll-to-plate nanoimprinting with flexible stamps is a fabrication method to pattern large-area substrates with micro- and nanotextures. The imprint consists of the preferred texture on top of a residual layer, of which the thickness and…
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Keywords:
layer;
residual layer;
layer thickness;
plate nanoimprinting ... See more keywords
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Published in 2025 at "Micromachines"
DOI: 10.3390/mi16121360
Abstract: Propagation phase metasurfaces have excellent electromagnetic regulation and polarization-insensitive properties, while roll-to-plate nanoimprint lithography (R2P-NIL) is ideal for their large-scale low-cost fabrication. Existing demolding simulations for R2P-NIL are limited to 2D analysis, ignore elastomeric roller…
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Keywords:
phase metasurfaces;
propagation phase;
simulation;
roll plate ... See more keywords