Monolithic Heterogeneous Integration of 3D Radio Frequency L−C Elements by Self‐Rolled‐Up Membrane Nanotechnology
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DOI: 10.1002/adfm.202004034
Abstract: This work reports a three‐dimensional (3D) radio frequency L−C filter network enabled by a CMOS‐compatible two‐dimensional (2D) fabrication approach, which combines inductive (L) and capacitive (C) self‐rolled‐up membrane (S‐RuM) components monolithically into a single L−C… read more here.
Keywords: self rolled; rolled membrane; frequency; nanotechnology ... See more keywords