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Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3511-9
Abstract: UV roller imprinting is one of the most efficient mass-production processes for microstructure replication. Roller imprinting of microstructure on both top and bottom surfaces of substrate is challenging. The imprinting pressure has to remain uniform.…
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Keywords:
pressure;
air bearing;
roller imprinting;
roller ... See more keywords