Thermodynamic Characterization of Ruthenium β-Diketonate Complex Ru(thd)3 as a Precursor for the CVD Preparation of Coatings
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DOI: 10.1134/s0036023620050241
Abstract: The thermodynamic properties of ruthenium complex compound Ru(thd)3, (thd is tris(2,2,6,6-tetramethyl-3,5-heptadionate), Ru(C11H19O2)3 have been studied. Temperatures (434.8 ± 2.0, 452.2 ± 1.0, and 461.1 ± 1.0, and 487.8 ± 1 K) and thermodynamic parameters (enthalpy… read more here.
Keywords: thd; diketonate complex; ruthenium diketonate; thermodynamic characterization ... See more keywords