Cobalt and Ruthenium drift in ultra-thin oxides
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DOI: 10.1016/j.microrel.2019.113407
Abstract: Abstract Cobalt (Co) and ruthenium (Ru) have been proposed for novel metallization schemes to replace copper in next generation BEOL systems that will use ultra-thin oxide layers. Using TDDB measurements performed on planar capacitors we… read more here.
Keywords: drift; thin oxides; ultra thin; drift ultra ... See more keywords