Preparing ripening-suppressed metallic nanoparticles using a laser-irradiated carbon nanotube sacrificial layer
Sign Up to like & getrecommendations! Published in 2020 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.144705
Abstract: Abstract Supported metallic nanoparticles on a substrate has wide applications in catalysis, sensors and biological detection, where small particle size and uniform distribution are desired. Among the various preparation methods, thermal-induced nanofilm dewetting is a… read more here.
Keywords: metallic nanoparticles; sacrificial layer; carbon nanotube; laser irradiated ... See more keywords
Releasable SU-8 structures for various microfabrication processes using a water-soluble sacrificial layer
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.03.002
Abstract: A promising release technique for SU-8 using a water-soluble sacrificial layer based on germanium oxide is developed. The relatively high etching rate of germanium oxide in water and its high etching selectivity make it suitable… read more here.
Keywords: water; water soluble; sacrificial layer; using water ... See more keywords
Effects of post bonding annealing on GaAs//Si bonding interfaces and its application for sacrificial-layer-etching based multijunction solar cells
Sign Up to like & getrecommendations! Published in 2020 at "Solar Energy Materials and Solar Cells"
DOI: 10.1016/j.solmat.2020.110501
Abstract: Abstract By using the sacrificial layer (SL) etching, GaAs substrates are separated from III–V epi substrate//Si substrate junctions that are made by surface activated bonding (SAB) technologies. The post-bonding low-temperature (300- ∘ C) annealing plays… read more here.
Keywords: gaas substrates; gaas; post bonding; sacrificial layer ... See more keywords
Sacrificial layer for laser lift-off process for flexible-display production
Sign Up to like & getrecommendations! Published in 2019 at "Vacuum"
DOI: 10.1016/j.vacuum.2019.108968
Abstract: Abstract In this study, we developed a new sacrificial layer (SL) for laser transfer process. Metallic substrate i.e. invar foil was temporarily docked to a glass substrate using glass powder. To ensure successful delamination, the… read more here.
Keywords: laser; layer laser; process; sacrificial layer ... See more keywords
Fabrication of amorphous IGZO thin film transistor using self-aligned imprint lithography with a sacrificial layer
Sign Up to like & getrecommendations! Published in 2018 at "Applied Physics Letters"
DOI: 10.1063/1.5022714
Abstract: An amorphous indium-gallium-zinc-oxide (a-IGZO) thin film transistor (TFT) was fabricated by a self-aligned imprint lithography (SAIL) method with a sacrificial photoresist layer. The SAIL is a top-down method to fabricate a TFT using a three-dimensional… read more here.
Keywords: layer; fabrication; process; sacrificial layer ... See more keywords
Fabrication of 3D SiO x structures using patterned PMMA sacrificial layer
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa935b
Abstract: Three-dimensional (3D) nanofabrication based on electron-beam lithography (EBL) has drawn wide attention for various applications with its high patterning resolution and design flexibility. In this work, we present a bilayer EBL process to obtain 3D… read more here.
Keywords: sacrificial layer; sio structures; fabrication sio; freestanding sio ... See more keywords
Sub-10-nm-thick SiN nanopore membranes fabricated using the SiO2 sacrificial layer process
Sign Up to like & getrecommendations! Published in 2021 at "Nanotechnology"
DOI: 10.1088/1361-6528/ac10e3
Abstract: In our previous studies, ultrathin SiN membranes down to 3 nm in thickness were fabricated using the poly-Si sacrificial layer process, and nanopores were formed in those membranes. The region of the SiN membrane fabricated… read more here.
Keywords: layer; process; sacrificial layer; fabricated using ... See more keywords
Germanium as a scalable sacrificial layer for nanoscale protein patterning
Sign Up to like & getrecommendations! Published in 2018 at "PLoS ONE"
DOI: 10.1371/journal.pone.0195062
Abstract: We demonstrate the use of germanium (Ge) films as water-soluble features that allow the patterning of proteins onto surfaces with commonly used organic solvents. This technique is scalable for manufacturing and is compatible with nano-… read more here.
Keywords: germanium scalable; sacrificial layer; protein patterning;