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Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.01.009
Abstract: The preparation of transparent complex 3D structures over large areas at low cost paves the way for numerous optical applications. We prepared nanostructures on the surface of microstructures in a negative tone photoresist by a…
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Keywords:
double imprint;
structures via;
via double;
sacrificial mould ... See more keywords