Selective Area Epitaxial Growth of Stretchable Geometry AlGaN-GaN Heterostructures
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DOI: 10.1007/s11664-018-6576-z
Abstract: We report on the selective area epitaxy (SAE) of AlGaN/GaN microstructures in stretchable geometric patterns. We have investigated dependence of Al incorporation, lateral/sidewall growth profile and electrical properties of SAE heterostructures on Al/Ga source ratio… read more here.
Keywords: algan gan; selective area; geometry; sae algan ... See more keywords