Modeling of thermal processes in magnetrons with single hot target and “sandwich-target”
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DOI: 10.1016/j.surfcoat.2018.12.070
Abstract: Abstract The present work studies thermal processes in DC magnetron sputtering units. A unit with a single hot titanium target is used to deposit films of titanium and titanium nitride. Another sputtering unit called “sandwich-target”… read more here.
Keywords: thermal processes; modeling thermal; single hot; titanium ... See more keywords