Cavity etching evolution on the A-plane of sapphire crystal in molten KOH etchant
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DOI: 10.1016/j.jcrysgro.2020.125926
Abstract: Abstract Chemical wet etching technology is widely applied in semiconductor device fabrication such as the patterned sapphire substrates. However, the etching of pre-formed structure is still lack of investigations, which has potential applications in the… read more here.
Keywords: sapphire crystal; molten koh; sapphire; cavity ... See more keywords