Investigations about Al and Cu-Based Planar Spiral Inductors on Sapphire for GaN-Based RF Applications
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DOI: 10.3390/app11115164
Abstract: Conventionally, Cu is preferred over Al to fabricate integrated inductors with higher quality factors on either silicon or sapphire substrates, profiting from its lower resistivity. However, after investigating and comparing these two kinds of metal… read more here.
Keywords: planar spiral; sapphire gan; based planar; inductors sapphire ... See more keywords