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   Articles with "sapphire substrate" as a keyword



Solid-phase epitaxy of a cavity-shaped amorphous alumina nanomembrane structure on a sapphire substrate

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recommendations! Published in 2018 at "Journal of Crystal Growth"

DOI: 10.1016/j.jcrysgro.2018.06.012

Abstract: Abstract A stripe-shaped cavity structure was formed with amorphous alumina membrane on a sapphire substrate and its solid phase epitaxy (SPE) to crystalline sapphire membrane was investigated by transmission electron microscopy (TEM). The SPE process… read more here.

Keywords: phase; sapphire substrate; solid phase; amorphous alumina ... See more keywords

Effect of V doping on initial growth of ZnO film on c-face sapphire substrate

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recommendations! Published in 2017 at "Materials Science in Semiconductor Processing"

DOI: 10.1016/j.mssp.2016.11.020

Abstract: Abstract The effects of the vanadium (V) doping on the initial growth of ZnO films on a c-face sapphire substrate were investigated. The V-doped ZnO (VZO) films were grown at 200 °C by RF magnetron sputtering… read more here.

Keywords: doping initial; initial growth; sapphire substrate; zno ... See more keywords

Fabrication of nano-cavity patterned sapphire substrate using self-assembly meshed Pt thin film on c-plane sapphire substrate

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recommendations! Published in 2017 at "Thin Solid Films"

DOI: 10.1016/j.tsf.2017.03.015

Abstract: Abstract In this work, a nano-cavity patterned sapphire substrate (nc-PSS) is fabricated by using a self-formed meshed Pt thin film on a c-plane sapphire substrate. The light output power of a GaN-based light emitting diode… read more here.

Keywords: sapphire substrate; patterned sapphire; plane sapphire; sapphire ... See more keywords

Heteroepitaxial Growth of an Ultrathin β-Ga2O3 Film on a Sapphire Substrate Using Mist CVD with Fluid Flow Modeling

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recommendations! Published in 2022 at "ACS Omega"

DOI: 10.1021/acsomega.2c04888

Abstract: β-Gallium oxide (Ga2O3) has received intensive attention in the scientific community as a significant high-power switching semiconductor material because of its remarkable intrinsic physical characteristics and growth stability. This work reports the heteroepitaxial growth of… read more here.

Keywords: mist cvd; growth; film; sapphire substrate ... See more keywords

Three dimensional characterization of GaN-based light emitting diode grown on patterned sapphire substrate by confocal Raman and photoluminescence spectromicroscopy

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recommendations! Published in 2017 at "Scientific Reports"

DOI: 10.1038/srep45519

Abstract: We performed depth-resolved PL and Raman spectral mappings of a GaN-based LED structure grown on a patterned sapphire substrate (PSS). Our results showed that the Raman mapping in the PSS-GaN heterointerface and the PL mapping… read more here.

Keywords: grown patterned; sapphire substrate; patterned sapphire; raman ... See more keywords

Improvement in the crystal quality of non-polar a-plane GaN directly grown on an SiO2 stripe-patterned r-plane sapphire substrate

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recommendations! Published in 2019 at "CrystEngComm"

DOI: 10.1039/c9ce00995g

Abstract: In this work, high-quality a-plane GaN was obtained by direct growth on a stripe-patterned sapphire substrate. read more here.

Keywords: plane; plane gan; quality; sapphire substrate ... See more keywords

Application of patterned sapphire substrate for III-nitride light-emitting diodes.

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recommendations! Published in 2022 at "Nanoscale"

DOI: 10.1039/d1nr08221c

Abstract: Recent decades have witnessed flourishing prosperity of III-nitride emitters in solid-state lighting and high-resolution displays. As one of the widely used substrates, sapphire shows superiority for heteroepitaxial growth of III-nitride light-emitting diode (LED) structure, due… read more here.

Keywords: iii nitride; patterned sapphire; nitride light; light emitting ... See more keywords

High-quality AlN film grown on a nanosized concave–convex surface sapphire substrate by metalorganic vapor phase epitaxy

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recommendations! Published in 2017 at "Applied Physics Letters"

DOI: 10.1063/1.5008258

Abstract: We developed a method for fabricating high-crystal-quality AlN films by combining a randomly distributed nanosized concavo–convex sapphire substrate (NCC-SS) and a three-step growth method optimized for NCC-SS, i.e., a 3-nm-thick nucleation layer (870 °C), a 150-nm-thick… read more here.

Keywords: quality; sapphire substrate; surface; quality aln ... See more keywords

Mechanism for the formation of nitrogen-filled voids after annealing of GaN on a sapphire substrate

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recommendations! Published in 2018 at "Journal of Applied Physics"

DOI: 10.1063/1.5039755

Abstract: This study investigated the formation of nitrogen-filled voids at the interface between a GaN layer grown on a sapphire substrate by metalorganic vapor phase epitaxy. These voids were formed in the sapphire substrate at the… read more here.

Keywords: sapphire substrate; filled voids; nitrogen filled; sapphire ... See more keywords
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Growth of high-quality one-inch free-standing heteroepitaxial (001) diamond on (11 2 ¯0) sapphire substrate

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recommendations! Published in 2020 at "Applied Physics Letters"

DOI: 10.1063/5.0024070

Abstract: One-inch free-standing (001) diamond layers on a (11 2 ¯0) (a-plane) sapphire substrate with an Ir buffer layer (Kenzan Diamond®) were grown. The full-width at half maximum values of (004) and (311) x-ray rocking curves… read more here.

Keywords: sapphire substrate; sapphire; one inch; 001 diamond ... See more keywords

The Influence of Inorganic Fillers in TDI-based Polyurethane Pad for Sapphire Substrate Chemical Mechanical Polishing

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recommendations! Published in 2025 at "ECS Journal of Solid State Science and Technology"

DOI: 10.1149/2162-8777/adca55

Abstract: A polishing pad plays a crucial role in chemical mechanical polishing (CMP) of semiconductor fabrication. Among the CMP pads, polyurethane (PU) pads have been widely applied in global planarization of sapphire substrate surface due to… read more here.

Keywords: sapphire; sapphire substrate; chemical mechanical; inorganic fillers ... See more keywords