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Published in 2017 at "Materials and Manufacturing Processes"
DOI: 10.1080/10426914.2016.1140194
Abstract: ABSTRACT In order to improve machining efficiency of sapphire wafer machining using the conventional loose abrasive process, fixed-abrasive diamond plates are investigated in this study for sapphire wafer grinding. Four vitrified bond diamond plates of…
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Keywords:
diamond plates;
removal;
surface;
sapphire wafers ... See more keywords
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Published in 2021 at "IEEE Access"
DOI: 10.1109/access.2021.3067329
Abstract: The thinning of sapphire wafers is a key process that affects the quality of optoelectronic devices. In the grinding process for sapphire, a hard and brittle material, the grade and surface conditions (wearing and chip…
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Keywords:
wheel monitoring;
sapphire wafers;
wheel;
grinding process ... See more keywords