Piezoelectric performance improvement of ScAlN film and two‐port SAW resonator application
Sign Up to like & getrecommendations! Published in 2019 at "Electronics Letters"
DOI: 10.1049/el.2019.2714
Abstract: Highly c -axis-oriented scandium-doped aluminium nitride films (ScAlN) were prepared on platinum substrates by DC magnetron sputtering. The effect of sputtering power on the crystal quality and piezoelectric properties of ScAlN thin film was investigated.… read more here.
Keywords: saw resonator; scaln film; piezoelectric properties; film ... See more keywords
High-Temperature SAW Resonator Sensors: Electrode Design Specifics
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2018.2797093
Abstract: Surface acoustic wave (SAW) sensors are steadily paving the way to wider application areas. Their main benefit consisting in the possibility of wireless interrogation with the radio frequency interrogation signal being the only energy source… read more here.
Keywords: saw resonator; temperature; frequency; high temperature ... See more keywords
Temperature Performance Study of SAW Sensors Based on AlN and AlScN
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14051065
Abstract: In this paper, the temperature performance of AlN-SAW resonators and AlScN-SAW resonators is studied. They are simulated by COMSOL Multiphysics, and their modes and the S11 curve are analyzed. The two devices were fabricated using… read more here.
Keywords: alscn saw; saw resonator; temperature performance; temperature ... See more keywords