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Published in 2020 at "Scientific Reports"
DOI: 10.1038/s41598-020-59083-3
Abstract: A general problem for semiconductor applications is that very slow deposition on expensive single-crystal substrates yields high crystalline quality with excellent electro-optical properties, but at prohibitive costs and throughput for many applications. In contrast, rapid…
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Keywords:
single crystal;
epitaxy large;
epitaxy;
scalable ultrafast ... See more keywords