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Published in 2019 at "Optics letters"
DOI: 10.1364/ol.44.005258
Abstract: An absolute optical encoder with nanometric positioning repeatability is introduced and investigated. The encoder consists of an improved scale grating and a compact two-probe reading head. The scale grating contains multiple unevenly spaced distance marks…
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Keywords:
scale grating;
absolute optical;
encoder;
optical encoder ... See more keywords