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Published in 2022 at "Applied Physics Express"
DOI: 10.35848/1882-0786/ac6567
Abstract: The centimeter-scale laser lift-off (LLO) of a UVB laser diode structure on nano-patterned AlN was demonstrated by using a 257 nm pulsed laser. The mechanism of this LLO, which can be used for vertical light-emitting…
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Keywords:
patterned aln;
laser lift;
laser;
nano patterned ... See more keywords