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Centimeter-scale laser lift-off of an AlGaN UVB laser diode structure grown on nano-patterned AlN

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Published in 2022 at "Applied Physics Express"

DOI: 10.35848/1882-0786/ac6567

Abstract: The centimeter-scale laser lift-off (LLO) of a UVB laser diode structure on nano-patterned AlN was demonstrated by using a 257 nm pulsed laser. The mechanism of this LLO, which can be used for vertical light-emitting… read more here.

Keywords: patterned aln; laser lift; laser; nano patterned ... See more keywords