A Small Bipedal Trans-Scale Precision Positioning Stage Based on Inertial Stick-Slip Driving
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DOI: 10.1007/s12541-020-00459-w
Abstract: The small size and high flexibility of the mobile platform is widely used in many fields such as electron scanning microscope (SEM), but the mobile platform still adopts the structure of guide rail at present… read more here.
Keywords: small bipedal; bipedal trans; mobile platform; trans scale ... See more keywords