Oxide Scale Sublimation Chemical Vapor Deposition for Controllable Growth of Monolayer MoS2 Crystals.
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DOI: 10.1002/smtd.202101107
Abstract: A newly developed oxide scale sublimation chemical vapor deposition (OSSCVD) technique for 2D MoS2 growth is reported. Gaseous MoO3 , which is supplied separately from H2 S, can be generated in situ by flowing O2… read more here.
Keywords: oxide scale; deposition; growth; scale sublimation ... See more keywords