Scaling a Fluorescent Detection System by Polymer-Assisted 3-D Integration of Heterogeneous Dies
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DOI: 10.1109/jmems.2018.2856935
Abstract: Scaling by 3-D integration of various heterogeneous components enables miniaturized systems. However, the heterogeneous system integration is challenging due to the dissimilarities in materials and process used in fabrication of individual components. In this paper,… read more here.
Keywords: detection system; scaling fluorescent; system; integration ... See more keywords