Theoretical investigation of Rayleigh surface acoustic wave propagation characteristics in c-axis-zigzag ScAlN film/silicon substrate structure
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Applied Physics"
DOI: 10.1063/5.0144838
Abstract: Surface acoustic wave (SAW) resonators are key components of mobile communication systems, and the development of wideband SAW resonators is especially required because next-generation mobile communication systems require high-speed data transmission using wide frequency bands.… read more here.
Keywords: film silicon; scaln film; film; silicon substrate ... See more keywords
Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13122260
Abstract: This paper presents a novel bimorph Piezoelectric Micromachined Ultrasonic Transducer (PMUT) fabricated with 8-inch standard CMOS-compatible processes. The bimorph structure consists of two layers of 20% scandium-doped aluminum nitride (Sc0.2Al0.8N) thin films, which are sandwiched… read more here.
Keywords: terminal connections; outer ring; scaln; plate electrodes ... See more keywords