Piezoelectric performance improvement of ScAlN film and two‐port SAW resonator application
Sign Up to like & getrecommendations! Published in 2019 at "Electronics Letters"
DOI: 10.1049/el.2019.2714
Abstract: Highly c -axis-oriented scandium-doped aluminium nitride films (ScAlN) were prepared on platinum substrates by DC magnetron sputtering. The effect of sputtering power on the crystal quality and piezoelectric properties of ScAlN thin film was investigated.… read more here.
Keywords: saw resonator; scaln film; piezoelectric properties; film ... See more keywords
Theoretical investigation of Rayleigh surface acoustic wave propagation characteristics in c-axis-zigzag ScAlN film/silicon substrate structure
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Applied Physics"
DOI: 10.1063/5.0144838
Abstract: Surface acoustic wave (SAW) resonators are key components of mobile communication systems, and the development of wideband SAW resonators is especially required because next-generation mobile communication systems require high-speed data transmission using wide frequency bands.… read more here.
Keywords: film silicon; scaln film; film; silicon substrate ... See more keywords