ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices
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DOI: 10.1063/5.0004943
Abstract: This paper reports on a platform for monolithic integration of piezoelectric and piezoresistive devices on a single chip using the ScAlN/3C-SiC/Si heterostructure. Surface acoustic wave devices with an electromechanical coupling of 3.2% and an out-of-band… read more here.
Keywords: scaln sic; piezoresistive devices; piezoelectric piezoresistive; monolithic integration ... See more keywords