Articles with "scaln thin" as a keyword



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Synthesis of ScAlN thin films on Si (100) substrates at room temperature

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Published in 2018 at "Microsystem Technologies"

DOI: 10.1007/s00542-017-3660-x

Abstract: Scandium aluminum nitride alloy (ScAlN) thin films have been synthesized using reactive sputtering of a scandium aluminum alloy (Sc0.40Al0.60) target on Si (100) substrates. We have investigated the effects of two sputtering control factors, namely… read more here.

Keywords: thin films; synthesis scaln; films 100; scaln thin ... See more keywords