Development of a new piezoelectric galvanometer scanner: fabrication, operation, and measurements
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DOI: 10.1088/1361-665x/ac028e
Abstract: Our objective in this study was to overcome the size and complexity of existing galvanometers by developing a direct-drive galvanometer based on the deformation of a double-layer ceramic piezoelectric disc with mirrored surface. The resulting… read more here.
Keywords: scanner fabrication; new piezoelectric; piezoelectric galvanometer; galvanometer ... See more keywords