Frequency Diverse Array Auto-Scanning Beam Characteristics and Potential Radar Applications
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Access"
DOI: 10.1109/access.2022.3197191
Abstract: Different from the phased-array with the same carrier frequency for all elements providing only angle-dependent beampattern, frequency diverse array (FDA) using a small frequency offset across its array elements offers new application capabilities due to… read more here.
Keywords: frequency; auto; scanning beam; beam characteristics ... See more keywords
Real-time correction of periodic nonlinearity in homodyne detection for scanning beam interference lithography
Sign Up to like & getrecommendations! Published in 2018 at "Optical Engineering"
DOI: 10.1117/1.oe.57.10.104107
Abstract: Abstract. Scanning beam interference lithography (SBIL) is an advanced large-area grating manufacturing technology. To produce gratings with nanoscale phase accuracy, the phase detector is demanded for a high precision in SBIL. A well-designed homodyne detector… read more here.
Keywords: detection; nonlinearity; time; correction ... See more keywords
Analysis and design of fringe phase control system for scanning beam interference lithography
Sign Up to like & getrecommendations! Published in 2021 at "Optical Engineering"
DOI: 10.1117/1.oe.60.6.064107
Abstract: Abstract. Scanning beam interference lithography (SBIL) is an advanced technology developed for manufacturing large-area diffraction grating at a nanometer-scale phase accuracy. To withstand environmental disturbances and maintain the interference fringes still relative to the substrate,… read more here.
Keywords: beam interference; phase control; scanning beam; interference ... See more keywords
Beam drift error and control technology for scanning beam interference lithography.
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DOI: 10.1364/ao.56.004138
Abstract: To improve the quality of grating masks made by scanning beam interference lithography, this article established a mathematical model of step-scanning exposure and analyzed the effects of the beam drift error on the interference image.… read more here.
Keywords: drift; interference; scanning beam; drift error ... See more keywords
Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model.
Sign Up to like & getrecommendations! Published in 2017 at "Optics express"
DOI: 10.1364/oe.25.010312
Abstract: A profile of an X-axis stage mirror results in a phase error of gratings in Scanning Beam Interference Lithography. Traditional methods of measuring the profile require extra probes and another large stage mirror on Y-axis,… read more here.
Keywords: axis; axis stage; scanning beam; stage mirror ... See more keywords