Scanning digital lithography providing high speed large area patterning with diffraction limited sub-micron resolution
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aabb1f
Abstract: A scanning digital lithography system using computer controlled digital spatial light modulator, spatial filter, infinity correct optical microscope and high precision translation stage is proposed and examined. Through utilizing the spatial filter to limit orders… read more here.
Keywords: resolution; scanning digital; lithography; digital lithography ... See more keywords
Fine Metal Mask 3-Dimensional Measurement by using Scanning Digital Holographic Microscope
Sign Up to like & getrecommendations! Published in 2018 at "Journal of the Korean Physical Society"
DOI: 10.3938/jkps.72.863
Abstract: For three-dimensional microscopy, fast and high axial resolution are very important. Extending the depth of field for digital holographic is necessary for three-dimensional measurements of thick samples. We propose an optical sectioning method for optical… read more here.
Keywords: fine metal; scanning digital; digital holographic; metal mask ... See more keywords