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Published in 2017 at "Optical Engineering"
DOI: 10.1117/1.oe.56.6.064103
Abstract: Abstract. We propose a laser trapping-based scanning dimensional measurement method for free-form surfaces. We previously developed a laser trapping-based microprobe for three-dimensional coordinate metrology. This probe performs two types of measurements: a tactile coordinate and…
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Keywords:
laser;
scanning dimensional;
standing wave;
trapped microsphere ... See more keywords