Compressed-sensing wavenumber-scanning interferometry
Sign Up to like & getrecommendations! Published in 2018 at "Optics and Laser Technology"
DOI: 10.1016/j.optlastec.2017.08.003
Abstract: Abstract The Fourier transform (FT), the nonlinear least-squares algorithm (NLSA), and eigenvalue decomposition algorithm (EDA) are used to evaluate the phase field in depth-resolved wavenumber-scanning interferometry (DRWSI). However, because the wavenumber series of the laser's… read more here.
Keywords: compressed sensing; drwsi; scanning interferometry; wavenumber scanning ... See more keywords
Coherence scanning interferometry allows accurate characterization of micrometric spherical particles contained in complex media.
Sign Up to like & getrecommendations! Published in 2019 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2019.112859
Abstract: Characterizing very small particles, from a few dozen micrometers to the nanometric scale, is a very challenging application in a wide range of domains. In this work, we demonstrate, through the recovery of silica and… read more here.
Keywords: coherence scanning; interferometry allows; characterization; scanning interferometry ... See more keywords
Applications of model-based transparent surface films analysis using coherence-scanning interferometry
Sign Up to like & getrecommendations! Published in 2017 at "Optical Engineering"
DOI: 10.1117/1.oe.56.11.111709
Abstract: Abstract. Surface metrology must increasingly contend with submicron films, whose prevalence now extends to products well beyond semiconductor devices. For optical technologies such as coherence-scanning interferometry (CSI), transparent submicron films pose a dual challenge: film… read more here.
Keywords: topography; model based; scanning interferometry; surface ... See more keywords
Coherence scanning interferometry with a focus-tunable lens.
Sign Up to like & getrecommendations! Published in 2019 at "Applied optics"
DOI: 10.1364/ao.58.000g91
Abstract: Coherence scanning interferometry is an established optical method that is able to measure the shape of objects with high precision. The surface of the object to be measured can be both optically smooth and optically… read more here.
Keywords: coherence scanning; tunable lens; scanning interferometry; focus tunable ... See more keywords
Precision improvement in frequency scanning interferometry based on suppression of the magnification effect.
Sign Up to like & getrecommendations! Published in 2020 at "Optics express"
DOI: 10.1364/oe.385357
Abstract: Frequency scanning interferometry (FSI) is a promising technique for absolute distance measurement and has been demonstrated in many industrial applications. However, in practice, the measurement precision is limited and sensitive to the variations of the… read more here.
Keywords: scanning interferometry; frequency scanning; frequency; magnification effect ... See more keywords