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Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.02.010
Abstract: In this paper we present the design, technology and application of Si/Si3N4 micro calibration stage equipped with Pt microheaters. This 500nm thick MEMS structure with 4 independently controlled microheaters allows for precise control temperature dissipation…
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Keywords:
microscopy;
thermal microscopy;
microscopy probes;
structure ... See more keywords
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Published in 2017 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2017.01.012
Abstract: While measuring the thermal properties of a thin film, one of the most often encountered problems is the influence of the substrate thermal properties on measured signal and the need for its separation. In this…
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Keywords:
conductivity thin;
microscopy;
analysis;
thermal conductivity ... See more keywords
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Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c06870
Abstract: Temperature mapping by in situ thermoreflectance thermal imaging (TRTI) or midwave infrared spectroscopy has played an important role in understanding the origins of threshold switching and the effect of insulator-metal transitions in oxide-based memrsitive devices.…
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Keywords:
spatial resolution;
microscopy;
thermal mapping;
thermal microscopy ... See more keywords
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Published in 2017 at "Applied Physics Letters"
DOI: 10.1063/1.4997914
Abstract: By thermally characterizing nanometer-thin suspended silicon membranes with various micrometric lengths in ambient conditions, we determine simultaneously the spatial resolution of our Wollaston-probe scanning thermal microscopy experiment, which probes an area of (285 nm)2, and the…
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Keywords:
silicon membranes;
microscopy;
thermal microscopy;
suspended silicon ... See more keywords
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Published in 2020 at "Journal of Applied Physics"
DOI: 10.1063/5.0020276
Abstract: We propose an approach for the characterization of scanning thermal microscopy (SThM) probe response using a sample with silicon dioxide steps. The chessboard-like sample provides a series of nine surfaces made of the same material,…
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Keywords:
microscopy;
thermal microscopy;
thermal conductivities;
effective thermal ... See more keywords
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Published in 2021 at "Journal of Applied Physics"
DOI: 10.1063/5.0020975
Abstract: The characterization of material thermal properties at nanoscales remains a challenge even if progress was achieved in developing outstanding characterization techniques like scanning thermal microscopy (SThM). In the present work, we propose a detailed procedure…
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Keywords:
methodology;
probe;
thermal interface;
tip surface ... See more keywords
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Published in 2020 at "Applied Physics Letters"
DOI: 10.1063/5.0023046
Abstract: Oxyselenide BiCuSeO is a promising thermoelectric material in the moderate temperature range, and nanostructuring is often adopted to enhance its thermoelectric properties. In these processes, secondary phases can be either induced inadvertently via doping or…
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Keywords:
microscopy;
thermal microscopy;
thermal conductivity;
bicuseo ... See more keywords
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Published in 2022 at "Nanotechnology"
DOI: 10.1088/1361-6528/aca90f
Abstract: Scanning thermal microscopy (SThM) enables to obtain thermal characteristic information such as temperature and thermal conductivity from the signals obtained by scanning a thermometer probe over a sample surface. Particularly, the precise control of the…
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Keywords:
near field;
microscopy;
scanning thermal;
thermal microscopy ... See more keywords
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Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12091479
Abstract: The thermophysical properties at the nanoscale are key characteristics that determine the operation of nanoscale devices. Additionally, it is important to measure and verify the thermal transfer characteristics with a few nanometer or atomic-scale resolutions,…
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Keywords:
pico watt;
microscopy;
heat;
sthm ... See more keywords