Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression
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DOI: 10.1109/lpt.2017.2787100
Abstract: A route of spatial modulation-assisted scanning white-light interferometry with the inhibition of background noises and light source fluctuations for the topography measurement of micro-/nano-structure surface was explored in this letter. The spatial modulation frequency was… read more here.
Keywords: modulation; modulation assisted; scanning white; spatial modulation ... See more keywords
Transfer standard for traceable dynamic calibration of stroboscopic scanning white light interferometer.
Sign Up to like & getrecommendations! Published in 2017 at "Applied optics"
DOI: 10.1364/ao.56.002483
Abstract: The reconstructed image of a moving sample always shows a distorted representation of reality. Therefore, one needs to calibrate, for example, out-of-plane nano-videos for quality control of nano-microelectromechanical systems (N-MEMS). Here we discuss how to… read more here.
Keywords: standard traceable; transfer standard; stroboscopic scanning; traceable dynamic ... See more keywords