Articles with "scattering waypoints" as a keyword



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Path Planning of Randomly Scattering Waypoints for Wafer Probing Based on Deep Attention Mechanism

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Published in 2023 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"

DOI: 10.1109/tsmc.2022.3184155

Abstract: Wafer probing is a critical process employed to measure the yield of wafer fabrication. The primary object of wafer probing is to find the defect grain on the wafer. After a full coverage check, there… read more here.

Keywords: scattering waypoints; randomly scattering; wafer probing; attention ... See more keywords