Structural and Elastic Properties of Empty-Pore Metalattices Extracted via Nondestructive Coherent Extreme UV Scatterometry and Electron Tomography.
Sign Up to like & getrecommendations! Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c09360
Abstract: Semiconductor metalattices consisting of a linked network of three-dimensional nanostructures with periodicities on a length scale read more here.
Keywords: scatterometry; empty pore; electron tomography; elastic properties ... See more keywords
Perspective: Optical measurement of feature dimensions and shapes by scatterometry
Sign Up to like & getrecommendations! Published in 2018 at "APL Materials"
DOI: 10.1063/1.5018310
Abstract: The use of optical scattering to measure feature shape and dimensions, scatterometry, is now routine during semiconductor manufacturing. Scatterometry iteratively improves an optical model structure using simulations that are compared to experimental data from an… read more here.
Keywords: measurement feature; feature; gaa transistor; perspective optical ... See more keywords
Automatic feature selection in EUV scatterometry.
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DOI: 10.1364/ao.58.005916
Abstract: Scatterometry is an important nonimaging and noncontact method for optical metrology. In scatterometry certain parameters of interest are determined by solving an inverse problem. This is done by minimizing a cost functional that quantifies the… read more here.
Keywords: problem; feature selection; automatic feature; inverse problem ... See more keywords
Coherent Fourier scatterometry using orbital angular momentum beams for defect detection.
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DOI: 10.1364/oe.414584
Abstract: Defect inspection on lithographic substrates, masks, reticles, and wafers is an important quality assurance process in semiconductor manufacturing. Coherent Fourier scatterometry (CFS) using laser beams with a Gaussian spatial profile is the standard workhorse routinely… read more here.
Keywords: coherent fourier; scatterometry; angular momentum; fourier scatterometry ... See more keywords