Single crystal diamond cantilever for micro-electromechanical systems
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DOI: 10.1016/j.diamond.2016.10.011
Abstract: Abstract A single crystal diamond (SCD) cantilever has been fabricated on HPHT diamond substrate by using ion implantation and patterning technique. Firstly, the carbon ions were vertically implanted into diamond substrate to create a non-diamond… read more here.
Keywords: scd cantilever; cantilever; single crystal; crystal diamond ... See more keywords