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Published in 2021 at "Diamond and Related Materials"
DOI: 10.1016/j.diamond.2021.108294
Abstract: Abstract Diamond is a key material for quantum devices and sensors, microelectromechanical systems, and the next-generation electronic devices. Microfabrication technology of single-crystal diamond (SCD) for device fabrication and processing is required but hardly established. For…
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Keywords:
mold high;
nickel mold;
scd surface;
diamond ... See more keywords