High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector.
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DOI: 10.1364/oe.485779
Abstract: We present high-speed and wide-field EUV ptychography at 13.5 nm wavelength using a table-top high-order harmonic source. Compared to previous measurements, the total measurement time is significantly reduced by up to a factor of five by… read more here.
Keywords: speed; euv; wide field; scmos detector ... See more keywords