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Published in 2021 at "Vacuum"
DOI: 10.1016/j.vacuum.2020.109837
Abstract: Abstract The existing asynchronous suction scroll vacuum pump with only one suction port has higher area utilization ratio than that of the existing synchronous suction scroll vacuum pump with two suction ports, but its built-in…
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Keywords:
suction;
vacuum pump;
scroll vacuum;
scroll ... See more keywords