Development of an Integrated Electrostatic Precipitator and Wet Scrubber System for Controlling Nox and Particulate Matter Emissions From a Semiconductor Manufacturing Process
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DOI: 10.1109/tia.2020.3023670
Abstract: An integrated electrostatic precipitator (ESP) and wet scrubber system were developed to control nitrogen oxides (NOx) and particulate matter (PM) emissions from a semiconductor manufacturing process. The integrated system consisted of a NO oxidizer, wet… read more here.
Keywords: removal efficiency; wet scrubber; scrubber system; scrubber ... See more keywords