Process method of Si3N4 ceramic brazing sealed cavity for high-temperature application
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DOI: 10.3389/fchem.2022.1019822
Abstract: The process method of a Si3N4 ceramic sealed cavity is realized by vacuum brazing and chemical reaction at 1,100°C and 0.5 MPa pressure. Through the combination of Si3N4 ceramic polishing and thinning, inductively coupled plasma… read more here.
Keywords: cavity; si3n4 ceramic; high temperature; sealed cavity ... See more keywords