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Published in 2020 at "Materials"
DOI: 10.3390/ma14010128
Abstract: High hardness and corrosion resistance of SiC (silicon carbide) bulk materials have always been a difficult problem in the processing of an all-SiC piezoresistive pressure sensor. In this work, we demonstrated a SiC sealing cavity…
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Keywords:
sic sealing;
pressure sensor;
sealing cavity;
sic piezoresistive ... See more keywords