Assessing the Impact of Secondary Fluorescence on X-Ray Microanalysis Results from Semiconductor Thin Films
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DOI: 10.1017/s1431927622000770
Abstract: Abstract The impact of secondary fluorescence on the material compositions measured by X-ray analysis for layered semiconductor thin films is assessed using simulations performed by the DTSA-II and CalcZAF software tools. Three technologically important examples… read more here.
Keywords: semiconductor thin; thin films; impact secondary; fluorescence ... See more keywords