Capacitive Accelerometers with Beams Based on Alternated Segments of Different Widths
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DOI: 10.3390/act9040097
Abstract: Microelectromechanical (MEM) Accelerometers measure the accelerations or vibrations experienced by objects due to inertial forces or mechanical excitations. To improve their proof mass displacement, several alternatives have been used, such as the design of different… read more here.
Keywords: proof mass; different widths; alternated segments; segments different ... See more keywords