Automatic feature selection in EUV scatterometry.
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DOI: 10.1364/ao.58.005916
Abstract: Scatterometry is an important nonimaging and noncontact method for optical metrology. In scatterometry certain parameters of interest are determined by solving an inverse problem. This is done by minimizing a cost functional that quantifies the… read more here.
Keywords: problem; feature selection; automatic feature; inverse problem ... See more keywords