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Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c00009
Abstract: Bottom-up synthesis based on site-selective atomic layer deposition is a powerful atomic-scale processing approach to fabricate materials with desired functionalities. Typical selective atomic layer deposition (ALD) can be achieved using selective activation of a growth…
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Keywords:
site selective;
layer deposition;
atomic layer;
selective atomic ... See more keywords
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Published in 2023 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.3c03752
Abstract: Area-selective atomic layer deposition (AS-ALD) has drawn significant attention in the past decade because of the potential applications in bottom-up processing, which enables fabricating nanostructures at the atomic level without multiple patterning and lithographic processing…
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Keywords:
area selective;
layer deposition;
atomic layer;
deposition ... See more keywords
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Published in 2017 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.7b13365
Abstract: The reaction mechanism of area-selective atomic layer deposition (AS-ALD) of Al2O3 thin films using self-assembled monolayers (SAMs) was systematically investigated by theoretical and experimental studies. Trimethylaluminum (TMA) and H2O were used as the precursor and…
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Keywords:
al2o3;
area selective;
deposition;
selective atomic ... See more keywords
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Published in 2021 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/6.0000701
Abstract: The increasingly complex nanoscale three-dimensional and multilayered structures utilized in nanoelectronic, catalytic, and energy conversion/storage devices necessitate novel substrate-selective material deposition approaches featuring bottom-up and self-aligned precision processing. Here, we demonstrate the area-selective atomic layer…
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Keywords:
layer;
area selective;
deposition;
selective atomic ... See more keywords